Gadolinium silicate gate dielectric films with sub-1.5 nm equivalent oxide thickness
Why this work is in the frame
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Bibliographic record
Abstract
GdSi x O y gate dielectric films were deposited on Si(001) substrates using ultra-high-vacuum electron-beam evaporation from pressed-powder targets. Transmission electron microscopy showed that the films were amorphous as deposited and remained amorphous when annealed to temperatures up to 900 °C. Capacitance–voltage measurements indicate an equivalent oxide thickness (EOT) of 13.4 Å for a film with composition GdSi0.56O2.59 determined by in situ x-ray photoelectron emission spectroscopy. After forming gas annealing at 500 °C the EOT was reduced to 11.0 Å, at a physical thickness of 45 Å. The same film has a low leakage current of approximately 5.7×10−3 A cm−2 at +1 V, a reduction of 8.7×104 compared to current density estimates of SiO2 films with the same specific capacitance.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it