Sub-100°C a-Si:H thin-film transistors on plastic substrates with silicon nitride gate dielectrics
Bibliographic record
Abstract
Fabrication on thin-film transistors (TFTs) on flexible plastic substrates for large-area imagers and displays has been made possible by lowering the deposition temperatures, which reduces the thermal deformation of plastic substrates, greatly facilitating substrate preparation and device patterning. Furthermore, at extremely low deposition temperatures, much wider variety of low-cost substrates, plastics or otherwise, are available for use. In this article, we report on a-Si:H TFTs fabricated at 75°C on glass and plastic substrates. The TFTs were fabricated using inverted–staggered topology, in a full wet etch process. The TFT structures consisted of 140nm of sputtered Mo for gate, 380nm of plasma-enhanced chemical vapor deposition (PECVD) a-SiNx:H gate dielectric optimized for 75°C, 50nm of PECVD a-Si:H channel material, 50nm of PECVD n+ a-Si:H for source∕drain contacts, and sputtered Al for contact metallization. Current–voltage characteristics were measured, and relevant transistor parameters were calculated. TFTs exhibited the leakage current below 10−12A, and on∕off current ratio exceeding 105. The results were compared to those for high temperature a-Si:H TFTs, and the differences are discussed.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.002 | 0.003 |
| Science and technology studies | 0.000 | 0.002 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.002 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".