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Record W2080054179 · doi:10.1109/jsen.2012.2225043

Strain Transfer Analysis of Surface-Bonded MEMS Strain Sensors

2012· article· en· W2080054179 on OpenAlexaff
Maziar Moradi, Siva Sivoththaman

Bibliographic record

VenueIEEE Sensors Journal · 2012
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsUniversity of Waterloo
Fundersnot available
KeywordsMaterials scienceFinite element methodStrain gaugeAdhesiveMicroelectromechanical systemsTrenchSensitivity (control systems)Deep reactive-ion etchingStrain (injury)Layer (electronics)Etching (microfabrication)Composite materialOptoelectronicsElectronic engineeringStructural engineeringReactive-ion etchingEngineering

Abstract

fetched live from OpenAlex

The transmission of strain fields in adhesively bonded MEMS strain sensors is analyzed. In strain sensors that are attached to host structures using adhesive layers such as epoxy, complete strain transfer to the sensor is hindered due to the influence of the adhesive layer on the transfer. This paper presents an analytical model, validated by finite element method simulation, to provide insight and accurate formulation for strain transfer mechanism for bonded sensors. A shear-lag parameter has been introduced to account for the component geometry and properties. The model is capable of predicting the strain transmission ratio through a sensor gauge factor, and it clearly establishes the effects of the flexibility, length, and thickness of the adhesive layer and MEMS sensor substrate. Finally, modifications to sensor substrates, by the implementation of micromachined tapered edges and trench etching, are proposed in order to increase the strain transmission ratio. It has been found, for the selected case study, that the sensor sensitivity could be enhanced by up to 30%. This work on bonding analysis is applicable for performance prediction and calibration in sensor systems design.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.243
Threshold uncertainty score0.919

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0000.001
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.020
GPT teacher head0.250
Teacher spread0.230 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations32
Published2012
Admission routes1
Has abstractyes

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