Influence de la température de substrat sur la croissance et les propriétés des films minces de silicium amorphe déposés par pulvérisation cathodique
Bibliographic record
Abstract
We deposit thin films of a-Si:H by RF diode spray on substrate with temperatures varying from 200 to 500 °C. Knowing that this deposition method is violent when compared with the plasma-assisted deposition method, we have used low RF power to limit the energy of the Ar ions bombarding the surface of the growing film. Characterization of the films by UVvisible absorption spectroscopy suggests that the influence of the substrate temperature can be classified into three different regimes: (i) low temperature, T s < 300 °C: the films show a strong disorder, the hydrogen is bound only in the polyhydric configuration; (ii) intermediate temperature, 300 °C < T s < 400 °C: film growth is rapid, the films present a lower defect density; this may be the best regime to make good quality a-Si:H films using the spraying method; (iii) high temperature, T s > 400 °C: the films are more organized, but less hydrogenated. The substrate temperature influences the film properties by modifying the growing mechanism through a control of the reactions taking place at the plasmasubstrate interface, where the hydrogen dynamics play a fundamental role.[Journal translation]
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".