THB‐filled monolithic rectangular waveguides for millimeter wave applications
Bibliographic record
Abstract
A monolithic wafer‐level dielectric‐filled rectangular waveguide for millimeter‐wave applications is designed and fabricated. Unlike the existing wafer‐level rectangular waveguides that are based on hybrid integration techniques to assemble the waveguide, the three‐step fabrication process of the proposed waveguide enables the simultaneous monolithic fabrication of the dielectric‐filled waveguide as well as planar circuitry on one substrate. The maximum temperature during the entire fabrication process stays lower than 200 °C which is desirable for integrated circuit (IC) fabrication. Besides, the RF performance of the presented waveguide only depends on the RF properties of the filling dielectric not the carrier substrate (as in the case of Substrate Integrated Waveguides), which makes it ideal for silicon micro‐fabrication technology. A negative‐tone thick photoresist called THB N151 which can reach a thickness of 90 μm by single spinning is used and characterised. The results show a relative permittivity of ɛ r ′ = 3 and a loss tangent of tan δ = 0.018 for THB 151 which surpasses the RF performance of the highly used SU8 photoresist. An average insertion loss of 0.21 dB/mm is measured for the THB‐filled waveguide for the frequency range of 35–50 GHz. To perform the wafer‐level measurements, the waveguide is integrated with CPW to rectangular transition. Furthermore, it has been illustrated that other monolithic waveguide structures such as Turn or Y‐junction can be potentially developed by using the proposed solution.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".