High‐Q LIGA‐MEMS vertical cantilever variable capacitors for upper microwave frequencies
Bibliographic record
Abstract
Abstract Simulation results for four MEMS variable capacitors suitable for fabrication using the LIGA process are presented. A Q ‐factor as high as 435.6 was obtained using a copper‐device layer. The capacitor with a nominal capacitance of 0.24 pF has a self‐resonant frequency of 33.7 GHz, making it suitable for operation up to frequencies of approximately 18 GHz. Using a “pull‐away” actuation design, a tuning ratio of 1.43:1 was obtained with tuning voltages as low as 6.1 V. © 2004 Wiley Periodicals, Inc. Microwave Opt Technol Lett 42: 507–511, 2004; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.20352
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".