High‐Q LIGA‐MEMS vertical cantilever variable capacitors for upper microwave frequencies
Bibliographic record
Abstract
Abstract Simulation results for four MEMS variable capacitors suitable for fabrication using the LIGA process are presented. AQ‐factor as high as 435.6 was obtained using a copper‐device layer. The capacitor with a nominal capacitance of 0.24 pF has a self‐resonant frequency of 33.7 GHz, making it suitable for operation up to frequencies of approximately 18 GHz. Using a “pull‐away” actuation design, a tuning ratio of 1.43:1 was obtained with tuning voltages as low as 6.1 V. © 2004 Wiley Periodicals, Inc. Microwave Opt Technol Lett 42: 507–511, 2004; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.20352
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.001 | 0.000 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.006 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".