Ion bombardment-type high frequency metal ion source for compact ion beam deposition apparatus
Bibliographic record
Abstract
A novel metal ion source has been developed for a compact nonmass-separated ion beam deposition apparatus. To produce a dense plasma, a high frequency (hf) antenna coil made of Cu was mounted inside the metallic ionization chamber and a hf power of 300 W (13.56 MHz) was applied to this coil. A Cr rod target 10 mm in diameter was fitted at the center of the hf coil and a dc bias voltage of −600 V was applied to it. The temperature of a tip of the Cr rod target increased locally by means of ion bombardment; the Cr target material vaporized vigorously by sublimation and effectively ionized in the high density plasma. A pure Cr ion current of 400 μA was obtained at an energy of 100 eV without mass separation. Circular Cr thin films of 10 mm in diameter and 500 nm in thickness were deposited on Si substrates at a deposition rate of 30 nm/min at an ion energy of 100 eV. No contamination due to a sputtering of Cu antenna coil was detected by X-ray fluorescence analysis.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".