Resolution enhancement in probing of high-speed integrated circuits using dynamic electrostatic force-gradient microscopy
Bibliographic record
Abstract
Dynamic mode electrostatic force microscopy is a technique capable of measuring the internal voltage signals of high-speed integrated circuits. Circuit signals are extracted by utilizing the localized nonlinear Coulomb force acting on a microfabricated probe that is closely positioned above the circuit test point. Equivalent time sampling of repetitive high-frequency signals, that can have a bandwidth much greater than the mechanical response of the probe, is achieved by driving the probe with amplitude-modulated high-speed pulses. Currently, dynamic mode electrostatic force microscopes (DEFMs) extract circuit voltage signals through direct sensing of the electrostatic interaction which results in a poor spatial resolution and is susceptible to interference due to significant coupling to the tip sidewall and the cantilever support of the probe. This is especially true for large tip-to-sample distances such as when passivated circuits are measured. This article describes a force-gradient method to improve the spatial resolution of DEFM. The force-gradient method is implemented numerically and is based on sensing the force as the tip-sample distance is modulated. The method is shown to reduce the contribution from the tip sidewall and the cantilever. Measurements of high-speed signals up to 500 Mb/s demonstrate a significant reduction of interference signals.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.002 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".