Highly conductive n+ hydrogenated microcrystalline silicon and its application in thin film transistors
Bibliographic record
Abstract
n + μc- Si:H films were deposited using 13.56 MHz plasma enhanced chemical vapor deposition from a gas mixture of silane, phosphine, and hydrogen. To study the effect of deposition conditions and thickness dependence on film properties, and to optimize deposition regimes, we varied the rf power and doping ratio for two different hydrogen dilutions. The film properties were investigated using Raman, x-ray diffraction, secondary-ion-mass spectroscopy, and optical transmittance measurements, as well as dark conductivity. The growth mechanism for a formation of n+ μc-Si:H is explained in terms of a hydrogen dilution effect using the combination of surface diffusion and selective etching models. The optimal conductivity [25 (Ωcm)−1] 50 nm n+ μc-Si:H film was obtained with 99.6% hydrogen dilution of silane. Thin film transistors with this n+ μc-Si:H ohmic contact layer demonstrate a device mobility of 0.9 cm2/Vs, a threshold voltage of 3 V, an ON/OFF current ratio of above 107, a subthreshold slope of 0.5 V/dec, and a leakage current of the order of 10−13 A.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.002 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".