High-k titanium silicate dielectric thin films grown by pulsed-laser deposition
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Bibliographic record
Abstract
We report the pulsed-laser deposition of high-k titanium silicate thin films. The titanium silicate films were deposited by laser ablating a (Ti, Si) target in an oxygen pressure of 70 mTorr. The deposited films were found to exhibit nanocrystalline structure with a grain size of about 3.5 nm as deduced from x-ray diffraction measurements. Fourier transform infrared spectroscopy confirmed the existence of Ti–O–Si bonds in the films. The binding energies of [Ti 2p3/2 (458.6 eV), Si 2p (102.3 eV), O 1s (531.8 eV)] as measured by means of x-ray photoelectron spectroscopy provided evidence of titanium silicate. On the other hand, the average dielectric constant of the pulse laser deposited titanium silicate thin films were found to be about 11 in the frequency range of 100 kHz to 13 MHz.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it