Construction of a 3D MEMS Microcoil Using Sequential Robotic Microassembly Operations
Bibliographic record
Abstract
This paper describes the contruction of an out-of-plane MEMS (Micro-Electro Mechanical System) microcoil, by assembling together multiple surface micromachined microparts. A microgripper, which is bonded to the end-effector of a robotic workstation, is able to remove a micro-part from a MEMS chip, reorient the micro-part in space, move it to a secondary location, and join it to another micro-part. In this way, complex 3D microstructures can be assembled from a set of initially planar and parallel micro-parts. The microcoil is built from four loop elements, each 200 μm tall by 140 μm wide. The loop is closed by a base structure on the substrate, and the loops are spaced 50 μm apart. This four-loop microcoil is 200 × 140 × 200 μm in size. Using the described microassembly method, it is possible to fabricate microcoils with many loop elements of various sizes, spaced as closely as 25 μm apart.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".