Simulation and Characterization of a Novel Large Stroke Micromirror
Bibliographic record
Abstract
This paper reports on the simulation and characterization of a microelectromechanical system (MEMS) micromirror fabricated with PolyMUMPs. The overall diameter of the hexagonal micrimirror, including mirror plate and 3 supporting cantilevers fixed around, is 450um. A 3D model is built in finite element method (FEM) with COMSOL. Simulations of the elevated height of mirror plate, pull-in voltage and eigenfrequency of the micromirror are carried out. The static and dynamic performances of the fabricated micromirror are characterized by Veeco Optical Profiler and Polytek MEMS System Analyzer. The comparison between measurement and simulation exhibits good concordance. Surface topography measurement shows the elevated height and stress-induced concave deformation of mirror plate almost the same scale as demonstrated in FEM simulation. The Pull-In voltages are measured to be around 32V in current-voltage curve which is almost the same as in FEM simulation with one electrode biased. The fundamental resonant frequency is measured to be 4.3k Hz in torsional motion and 4.9k Hz in piston motion.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.003 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".