Photoinduced Chemical Vapor Deposition of Amorphous Carbon Films from Chloromethane Using a VUV Laser (157 nm)
Bibliographic record
Abstract
Amorphous carbon ( a -C) films with low hydrogen content were deposited at low substrate temperatures from a chlorinated hydrocarbon (CH 3 Cl) by photoinduced chemical vapor deposition with a fluorine laser (157 nm). The optical gap, as determined by photothermal deflection spectroscopy (PDS), decreased from 2.3 to 0.1 eV when the substrate temperature was increased from 303 to 643 K. The films were further characterized by FTIR spectroscopy, micro-Raman spectroscopy, surface acoustic wave spectroscopy (SAWS), and atomic force microscopy (AFM). The presence of chlorine residues in the films was examined by energy-dispersive X-ray fluorescence (EDXRF) spectroscopy. The amount of chlorine decreased significantly between 493 and 518 K, causing the carbon network to restructure into a more graphitic form. Deposition at 643 K produced a chlorine-free a -C film on the quartz substrate.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".