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Record W2092304342 · doi:10.1117/12.567675

Simulation of femtosecond laser ablation of silicon

2004· article· en· W2092304342 on OpenAlexafffund
Roman Holenstein, Sean E. Kirkwood, R. Fedosejevs, Ying Y. Tsui

Bibliographic record

VenueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004
Typearticle
Languageen
FieldEngineering
TopicLaser Material Processing Techniques
Canadian institutionsUniversity of Alberta
FundersNatural Sciences and Engineering Research Council of CanadaWestern Canada Research Grid
KeywordsMaterials scienceFemtosecondSiliconLaserLaser ablationMicroelectronicsAblationSurface micromachiningCrystalline siliconOptoelectronicsOpticsFabricationPhysics

Abstract

fetched live from OpenAlex

Femtosecond laser ablation is an important process in the micromachining and nanomachining of microelectronic, optoelectronic, biophotonic and MEMS components. The process of laser ablation of silicon is being studied on an atomic level using molecular dynamics (MD) simulations. We investigate ablation thresholds for Gaussian laser pulses of 800 nm wavelength, in the range of a few hundred femtoseconds in duration. Absorption occurs into a hot electron bath which then transfers energy into the crystal lattice. The simulation box is a narrow column approximately 6 nm x 6 nm x 80 nm with periodic boundaries in the x and y transverse directions and a 1-D heat flow model at the bottom coupled to a heat bath to simulate an infinite bulk medium corresponding to the solid bulk material. A modified Stillinger-Weber potential is used to model the silicon atoms. The calculated thresholds are compared to various reported experimental values for the ablation threshold of silicon. We provide an overview of the code and discuss the simulation techniques used.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.072
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0010.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.011
GPT teacher head0.231
Teacher spread0.220 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations11
Published2004
Admission routes2
Has abstractyes

Explore more

Same venueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIESame topicLaser Material Processing TechniquesFrench-language works237,207