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Record W2092939198 · doi:10.1088/0960-1317/17/8/013

Nd-YAG laser microvia drilling for interconnection application

2007· article· en· W2092939198 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueJournal of Micromechanics and Microengineering · 2007
Typearticle
Languageen
FieldEngineering
TopicLaser Material Processing Techniques
Canadian institutionsToronto Metropolitan University
Fundersnot available
KeywordsMaterials scienceMicroelectronicsInterconnectionLaser drillingLaserOptoelectronicsDiodeDrillingWavelengthLaser ablationMachiningOpticsMetallurgyEngineering

Abstract

fetched live from OpenAlex

Interconnect via formation using a diode-pumped solid-state Nd-YAG laser is becoming an important technique for the high volume manufacturing of microelectronics. However, ablative microvia formation using Nd-YAG lasers suffers from poor quality at sidewalls and top surface, which affects the subsequent metallization process. In this paper we examined various parameters to improve the drilling quality. The influence of wavelength (355 nm and 532 nm) on the machining quality was also studied in detail. A comparative analysis between single-shot and multiple-shot ablation was tested and discussed at a wavelength of 532 nm.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.549
Threshold uncertainty score0.629

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.004
GPT teacher head0.201
Teacher spread0.197 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it