Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
Bibliographic record
Abstract
Hafnium oxide films deposited on silicon wafers from TEMAH and O2 plasma showed saturation at growth rate per cycle of 1.1Aå, which was independent of the plasma conditions. The same film deposited thermally using H2O as the oxidant saturated at 0.8Aå/cycle. By varying the plasma exposure time the compositional ratio of [O]/[Hf], as calculated from RBS measurements, changed from 2.0 to 2.13. The carbon content in plasma HfO2 films was < 2% compared to 8% in thermal HfO2 films. Titanium nitride films deposited on silicon wafers from TiCl4 and N2 / H2 plasma showed saturation at 0.33Aå/cycle, which was independent of plasma conditions and a resistivity of <170µΩ cm at 350{degree sign}C deposition temperature. The stoichiometry of the films can be changed from being slightly nitrogen rich to titanium rich by varying the N:H ratios in the plasma and limiting the amount of nitrogen available for the reaction. The chlorine impurity in TiN varied according to plasma exposure time (2.6% to 1.2%) and N2:H2 gas ratio in the plasma, with a corresponding change in resistivity (200µΩ - 150µΩ).
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".