Dielectric properties of amorphous hydrogenated silicon carbide thin films grown by plasma-enhanced chemical vapor deposition
Bibliographic record
Abstract
The dielectric properties have been determined for stoichiometric amorphous hydrogenated silicon carbide (a-SiC:H) films grown by means of the plasma-enhanced chemical vapor deposition (PECVD) technique. The dielectric constant, dielectric loss, breakdown voltage, and current–voltage (I–V) characteristics of the a-SiC:H PECVD films were systematically determined for various film thicknesses in the 90–1400 nm range. The PECVD a-SiC:H films exhibit not only a dielectric constant as high as 14 but also relatively high breakdown field values around 3 MV/cm. The dielectric constant of the a-SiC:H films was found to remain almost constant over all the investigated frequency range of 1 kHz to 13 MHz, while it decreases as the film thickness is diminished. The analysis of the I–V characteristics of the a-SiC:H films has revealed the existence of two different conduction mechanisms depending on the applied voltages. While exhibiting an ohmic conduction in the low-field region (<0.05 MV/cm), the film conduction at high fields (>0.25 MV/cm) is dominated by the Poole–Frenkel effect. In the low-field region, the conductivity of the a-SiC:H films was found to decrease exponentially from 10−10 S/cm to about 10−12 S/cm as the film thickness is increased from 90 to 1400 nm. At high fields, a thermal breakdown of the a-SiC:H films occurred at about 3 MV/cm as a consequence of thermal instabilities induced by Joule heating. The excellent dielectric properties of the PECVD a-SiC:H films are seen to be a consequence of their high density and low defect concentration.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".