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Record W2100272413 · doi:10.1109/mwsym.2012.6259646

Microwave susceptor design for wafer bonding applications

2012· article· en· W2100272413 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
Topic3D IC and TSV technologies
Canadian institutionsUniversity of Alberta
FundersNatural Sciences and Engineering Research Council of CanadaCMC Microsystems
KeywordsSusceptorMicrowaveMicrowave ovenWaferMaterials scienceMicrowave heatingOptoelectronicsComputer scienceProcess engineeringNanotechnologyTelecommunicationsEngineeringLayer (electronics)

Abstract

fetched live from OpenAlex

In this paper we present a new approach in the design of microwave susceptors to develop a low-cost, controllable and rapid localized heating technique for wafer bonding. In this technique, a commercial microwave oven is used as microwave source due to its low cost and wide accessibility. The microwave oven is modeled and efficient microwave susceptors are designed. Fabricated susceptors are tested inside a commercial microwave oven and show controllable rapid selective heating.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: none
GenreCandidate signal: Methods · Consensus signal: none
Teacher disagreement score0.868
Threshold uncertainty score0.213

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.029
GPT teacher head0.234
Teacher spread0.205 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Quick stats

Citations4
Published2012
Admission routes2
Has abstractyes

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