Reduction of the thermal budget of AlGaN/GaN heterostructures grown on silicon: A step towards monolithic integration of GaN‐HEMTs with CMOS
Bibliographic record
Abstract
In this paper, we investigate the reduction of thermal budgets associated with the growth of GaN high electron mobility transistor (HEMT) heterostructures. The reduction of such thermal budgets is desirable for the monolithic integration of GaN‐HEMT with CMOS circuits, when the latter are fabricated first. Indeed, due to the elevated temperatures required for the growth of III‐nitrides, the characteristics of the integrated CMOS devices may drift during the process. In order to determine in which extend the growth thermal budget could be reduced without penalty on the performances of GaN‐HEMTs, different structures were grown by ammonia‐molecular beam epitaxy (ammonia‐MBE) with standard and reduced growth temperatures. The epitaxial structures were then compared with regards to their structural and electrical properties. The present work sets the limit for a potential trade‐off between Si‐CMOS and GaN‐HEMTs degradation in a CMOS‐first monolithic integration scenario.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".