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Record W2100610827 · doi:10.1117/12.887553

Measurement of the point spread function of a soft x-ray microscope by single pixel exposure of photoresists

2011· article· en· W2100610827 on OpenAlexaff
Adam F. G. Leontowich, Tolek Tyliszczak, Adam P. Hitchcock

Bibliographic record

VenueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011
Typearticle
Languageen
FieldPhysics and Astronomy
TopicAdvanced X-ray Imaging Techniques
Canadian institutionsMcMaster University
Fundersnot available
KeywordsOpticsPhotoresistMicroscopeZone platePoint spread functionLithographyMaterials scienceMonochromatic colorFabricationResistDepth of focus (tectonics)OptoelectronicsPhysicsNanotechnologyDiffraction

Abstract

fetched live from OpenAlex

The monochromatic zone plate focused soft X-rays of scanning transmission X-ray microscopes (STXM) can be used to directly write patterns in common photoresists, analogous to lithography with a focused electron or ion beam. A radiation damage spreading phenomenon when patterning with high doses was recently determined to be due to the point spread function of the optical system (Leontowich et al., Applied Physics A: Materials Science and Processing 103, 1 (2011)). We have used this phenomenon to measure the point spread function of three different STXMs by making a series of single pixel exposures in a photoresist at focus over a controlled dose range. Our results suggest this measurement is sensitive to zone plate aberrations; thus, it could be valuable feedback for optimizing zone plate fabrication schemes and STXM performance.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.001
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.005

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.001
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0010.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0010.001
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.013
GPT teacher head0.214
Teacher spread0.201 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations9
Published2011
Admission routes1
Has abstractyes

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Same venueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIESame topicAdvanced X-ray Imaging TechniquesFrench-language works237,207