Linear Bilayer ALD Coated MEMS Varactor With High Tuning Capacitance Ratio
Bibliographic record
Abstract
A curl-up-plate microelectromechanical system (MEMS) varactor with an almost linear response and high tuning capacitance ratio is presented. The curl-up in the top plate is realized by the residual stress in the two layers that construct the top plate of the varactor. The linear response is achieved by having the curl-up plate designed to relax on the bottom plate and by having unanchored cantilever beams that prevent the pull-in, while applying a dc bias voltage. The developed varactor exhibits a low parasitic capacitance through etching the lossy substrate underneath the varactor's plates. A thin alumina dielectric layer of 100-nm thickness is deposited using an atomic-layer-deposition technique to provide electrical isolation between the two plates. This MEMS varactor exhibits an almost linear capacitance with a tuning ratio of 5 : 1.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".