Formation and Annihilation of Hydrogen Related Donor States in Proton Implanted and Subsequently Plasma Hydrogenated N-Type Float Zone Silicon
Bibliographic record
Abstract
The formation of hydrogen-related donor states was studied in proton-implanted and hydrogen plasma-treated Float-Zone silicon. H-implantations were executed at energies of 1 or 3 MeV, and fluences of 1x10E14 1/cm2. 13.56-MHz RF-plasma hydrogenations were done at 150 W for 15 min or 1 hour at substrate temperatures between 350 C and 500 C. Analysis was done by two-point-probe spreading-resistance measurements. H-plasma exposure for 15 min caused an enhanced donor concentration close to the projected ion range Rp. The donor states can be related to hydrogenated vacancy defects. Near the wafer surface n-type doping is also enhanced. Applying higher substrate temperatures (> 400 C) during plasma exposure, acceptor-like states overcompensate for the enhanced n-type doping near the surface. After 1-hour H-plasma exposure excessive donor states in the wafers subsurface region are completely annealed. At the surface n-type doping is still overcompensated for by acceptor-like defects attributed to hydrogenated vacancy defect clusters.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".