Design of Electrical Interconnect for SU-8 Microfluidic Systems
Bibliographic record
Abstract
In this paper, metal press-together contacts for electric interconnection between free-standing polymer microfluidic substrates is presented. In previous work, we have demonstrated fabrication and mechanical assembly and fluidic pressurization of interlocking SU-8 chip-to-chip connections. The addition of electronic routing to the microfluidic polymer chips and electronic interconnect between chips via polymer dip packaging would facilitate microfluidic and microelectronic integration. Towards this goal, metal press-on contacts are presented whereby two polymer substrates containing metals lines can be contacted while maintaining electrical continuity. A 50 nm thick chromium layer and 100 nm thick gold are patterned on enclosed polymer microchannels via metal etching. The metal lines are aligned in parallel and along side the whole length of the microchannels on each fluidic chip. Individual metal lines were tested for electrical resistance and continuity. For the 9000 mum long, by 500 mum wide, and 0.1 mum thick gold lines, the resistance varied from 7.6 to 9.6 Omega, which is on the same order of magnitude as the theoretical resistance of 4.4 Omega. Preliminary results show that removal of the SU-8 platform from the substrate, thus creating free-standing SU-8 microchips with enclosed channels, causes the resistance to increase to 550 Omega due to stress through reduction of the surface area of the conduction path. When the released SU-8 platform is aligned with another platform with metal lines in pressed together contact, electrical continuity is maintained.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".