Fabrication of PZT sol gel composite ultrasonic transducers using batch fabrication micromolding
Bibliographic record
Abstract
A new micromolding technique for fabricating high-frequency (>20 MHz) ultrasound transducers has been developed. The technique combines sol gel processing with an epoxy-based, photo-resist Su-8 micromold to form miniature PZT structures. An advantage of this technique as compared to more traditional lithographic galvanforming and abforming (LIGA) processing is that the intermediate step of producing a nickel-plated mold is avoided. Instead, the PZT is formed directly using a photo-resist. The resulting structures can be fabricated with aspect ratios up to 3:1 and thicknesses up to 50 micro. We have successfully fabricated 50-micro-thick linear array elements with 23-micro-wide elements separated by 15 kerfs. A 50-micro thick, 2.5-mm diameter, five-element annular array structure with 20-micro kerfs also has been fabricated. The micromolded PZT composite has a density of 5.7-5.8 micro 0.4 g/cm3 and a thickness coupling coefficient as high as 0.32.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.001 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".