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Record W2105634449 · doi:10.1116/1.3694010

Dopant depletion in the near surface region of thermally prepared silicon (100) in UHV

2012· article· en· W2105634449 on OpenAlexafffund
Jason Pitters, P. G. Piva, Robert A. Wolkow

Bibliographic record

VenueJournal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2012
Typearticle
Languageen
FieldEngineering
TopicThin-Film Transistor Technologies
Canadian institutionsUniversity of AlbertaNational Institute for Nanotechnology
FundersCanadian Institute for Advanced Research
KeywordsDopantDangling bondSiliconDopingAnalytical Chemistry (journal)Scanning tunneling microscopeMaterials scienceHydrogenChemistryOptoelectronicsNanotechnology

Abstract

fetched live from OpenAlex

Degenerately doped (arsenic) n-type hydrogen terminated silicon (100) samples were prepared using various heat treatments for ultrahigh vacuum scanning tunneling microscopy (STM) and spectroscopy (STS) analysis. Samples heat treated to 1050 °C were found to have a consistent level of doping throughout the bulk and near surface regions. STS revealed tunneling through dopant states consistent with degenerately doped samples. SIMS profiling and HREELS measurements confirmed dopant and carrier concentrations, respectively. Samples heated to 1250 °C were found to have a reduced concentration of dopants in the near surface region. STS measurements showed shifted I/V curves and the loss of tunneling through dopant states in the band gap, indicating reduced dopant concentrations. Observations were confirmed by SIMS and HREELS where depleted dopants and reduced carrier concentrations were measured. The effect of the varying surface dopant concentrations on the STM imaging characteristics of dangling bonds on hydrogen terminated surfaces was also investigated. Understanding the effect of thermal processing on near surface dopant atom concentrations will permit better control over equilibrium charge occupation and charging characteristics of dangling bond midgap states on H:silicon.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.004

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.016
GPT teacher head0.220
Teacher spread0.203 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations38
Published2012
Admission routes2
Has abstractyes

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Same venueJournal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and PhenomenaSame topicThin-Film Transistor TechnologiesFrench-language works237,207