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Record W2105963575 · doi:10.1117/12.479415

Single step direct-write photomask made from bimetallic Bi/In thermal resist

2003· article· en· W2105963575 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003
Typearticle
Languageen
FieldEngineering
TopicAdvancements in Photolithography Techniques
Canadian institutionsSimon Fraser University
Fundersnot available
KeywordsPhotomaskResistMaterials scienceOpticsLaserOptoelectronicsOpacityPhotoresistLithographyWavelengthLayer (electronics)Nanotechnology

Abstract

fetched live from OpenAlex

A new single step direct-write photomask process has been proposed by using Bi/In bimetallic thermal resist which turns almost transparent with high energy laser exposure. The Bi over In metallic films, each layer approximately 40 nm thick, were DC-sputtered onto quartz mask plate substrates in a single pump-down chamber. Before laser exposure the Bi/In had 2.91 Optical Density. Bi/In is a bimetallic thermal resist and hence shows near wavelength invariance exposure sensitivity from Near IR to UV light. For Bi/In exposure, up to 0.9 W Argon laser (514 nm) beam was focused by an f = 50 mm lens to a 10 micron spot. When writing a mask the Bi/In coated sample was placed on a computer-controlled high accuracy X-Y table and the pattern was raster-scanned by the laser at 10 mm/sec. After exposure the Bi/In film became nearly transparent (0.26 OD) at I-line (365 nm) wavelength, and remained conductive. Bi/In photomasks have been used together with a standard mask aligner to pattern the oxide and Al layer during the manufacturing of test solar cell devices in the lab. Experiments also showed that annealing the as-deposited films at 90°C before laser exposure increase the Bi/In transparency.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.272
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.001
Bibliometrics0.0000.001
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0010.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.010
GPT teacher head0.222
Teacher spread0.212 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it