Micropatternable, Electrically Conducting Polyaniline Photoresist Blends for MEMS Applications
Bibliographic record
Abstract
We present preparation and electrical characterization of Polyaniline (PANi) SU8 micropatternable photoresist blend for MEMS applications. The blend was prepared by shear mixing of PANi and SU8-2010 at an rpm of 1000 for 15 hours. The composite was spin coated on a silicon wafer at an 850 rpm in order to achieve a thickness of 50µm, followed by soft baking at 70 {degree sign}C for 35 minutes and cooling to room temperature. The desired structures were patterned using masked UV exposure for 60 seconds. Full cross linking of PANi SU-8 blend was achieved by a post-exposure bake at a temperature of 90{degree sign}C for 25 minutes followed by cooling to room temperature. The desired electrode structures and trace lines were then developed in SU-8 developer (Microchem{trade mark}) for 10 minutes by manual agitation. The fabricated structures were analyzed under SEM and Electron Dispersion X-ray Spectroscopy (EDS) demonstrating that an electrically conductive path is formed by PANI in SU-8 polymer matrix. It was also observed that resistivity of 4×103 Ω-m is achieved at 8.6 weight percentage of PANi in SU-8 polymer matrix.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".