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Record W2107925787 · doi:10.1109/ectc.2006.1645703

A Novel Method for Bonding of Ionic Wafers

2006· article· en· W2107925787 on OpenAlex
M.R. Howalder, Tadatomo Suga, M.J. Kim, Naoki Itoh, M. Jamal Deen, Peter Mascher

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
Topic3D IC and TSV technologies
Canadian institutionsMcMaster University
FundersMcMaster University
KeywordsMaterials scienceSapphireWaferAnnealing (glass)SiliconAnodic bondingAmorphous solidAnalytical Chemistry (journal)Wafer bondingIonic bondingComposite materialIonMineralogyOptoelectronicsOpticsCrystallographyChemistry

Abstract

fetched live from OpenAlex

A novel method for bonding sapphire, LiNbO/sub 3/, quartz and glass wafers with silicon using the modified surface activated bonding (SAB) method is described. In this method, the mating surfaces were cleaned and nano-adhesion Fe layers were deposited using a low energy argon ion beam simultaneously. The optical images show that the entire area of 4-inch wafers of LiNbO/sub 3//Si was bonded. Such images for other samples show particle induced voids across the interface. The average tensile strength for all of the mating pairs was much higher than 10 MPa. Prolonged irradiation reduces polarization in LiNbO/sub 3/, sapphire, quartz and Al-silicate glasses. Fe and Ar ions induced charge deposition may have resulted in electric field, which was responsible for the depolarization. The lattice mismatch induced local strain was found in LiNbO/sub 3//Si. No such strain was observed in the Al-silicate glass/Si interface probably because of annealing at 573 K for 8 h. The Al-silicate glass/Si interface showed a layer of 2-nm thick. An amorphous layer of 5-nm thick was observed with a layer across the LiNbO/sub 3//Si interface. The EELS spectra confirmed the presence of nano-adhesion Fe layers across the interface. These Fe layers associated with the electric filed induced by ion beam irradiation for prolonged period of time, particularly in Si/LiNbO/sub 3/, might be responsible for the high bonding strength between Si/ionic wafers at low temperature.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: none
GenreCandidate signal: Methods · Consensus signal: none
Teacher disagreement score0.619
Threshold uncertainty score0.147

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.014
GPT teacher head0.246
Teacher spread0.232 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Quick stats

Citations1
Published2006
Admission routes2
Has abstractyes

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