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Record W2108353309 · doi:10.1117/12.436888

BiIn: a sensitive bimetallic thermal resist

2001· article· de· W2108353309 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001
Typearticle
Languagede
FieldEngineering
TopicAdvancements in Photolithography Techniques
Canadian institutionsSimon Fraser University
Fundersnot available
KeywordsResistMaterials scienceBimetallic stripAnalytical Chemistry (journal)BismuthNanotechnologyLayer (electronics)MetallurgyMetalChemistry

Abstract

fetched live from OpenAlex

A class of DC-sputter deposited bimetallic thermal resists (BiIn, SnIn, BiSn) have been investigated with exposure sensitivities (7mj/cm<SUP>2</SUP>) near those of current organic photoresists. A prototype resist consists of stacked bismuth on indium layers (30-45nm thick) with thickness ratios matching the eutectic alloy points in BiIn binary phase diagram. Laser exposed areas have significantly different optical characteristics, with lower reflectivity and higher transparency, hence showing the imaged pattern before development, thus confirming correct exposures. Predicted exposure levels are almost wavelength invariant: &lt;5% change between 248 and 157nm. Profilometery results and SEM images showed no signs of ablation in the exposed areas. The BiIn resist was wet developed using a HNO<SUB>3</SUB>:CH<SUB>3</SUB>COOH:H<SUB>2</SUB>O (1:3:6) acid solution which preferentially removed the unexposed areas leaving written patterns of alloyed lines seen both under profilometery and SEM, and stripped in a dilute HCl:H<SUB>2</SUB>O<SUB></SUB>2:H<SUB>2</SUB>O bath. Shelf tests shows that the BiIn film is stable under 50#C/90% humidity conditions. XRD and TEM show that the film is polycrystalline. Both SnIn and BiSn exhibit similar resist property as BiIn that the exposed area converts to greater transparencies that unexposed areas, indicating these three bimetallic films can be a group of potential inorganic thermal resist.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.001
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.362
Threshold uncertainty score0.999

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.001
Meta-epidemiology (narrow)0.0010.001
Meta-epidemiology (broad)0.0010.002
Bibliometrics0.0000.001
Science and technology studies0.0000.001
Scholarly communication0.0000.001
Open science0.0020.000
Research integrity0.0010.001
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.011
GPT teacher head0.238
Teacher spread0.227 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it