BiIn: a sensitive bimetallic thermal resist
Bibliographic record
Abstract
A class of DC-sputter deposited bimetallic thermal resists (BiIn, SnIn, BiSn) have been investigated with exposure sensitivities (7mj/cm2) near those of current organic photoresists. A prototype resist consists of stacked bismuth on indium layers (30-45nm thick) with thickness ratios matching the eutectic alloy points in BiIn binary phase diagram. Laser exposed areas have significantly different optical characteristics, with lower reflectivity and higher transparency, hence showing the imaged pattern before development, thus confirming correct exposures. Predicted exposure levels are almost wavelength invariant: <5% change between 248 and 157nm. Profilometery results and SEM images showed no signs of ablation in the exposed areas. The BiIn resist was wet developed using a HNO3:CH3COOH:H2O (1:3:6) acid solution which preferentially removed the unexposed areas leaving written patterns of alloyed lines seen both under profilometery and SEM, and stripped in a dilute HCl:H2O2:H2O bath. Shelf tests shows that the BiIn film is stable under 50#C/90% humidity conditions. XRD and TEM show that the film is polycrystalline. Both SnIn and BiSn exhibit similar resist property as BiIn that the exposed area converts to greater transparencies that unexposed areas, indicating these three bimetallic films can be a group of potential inorganic thermal resist.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".