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Record W2109130690 · doi:10.1109/icmens.2005.43

Dynamic Deflection of Electrostatic MEMS

2006· article· en· W2109130690 on OpenAlexaff
Nassif Ghoussoub, Yujin Guo

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsUniversity of British Columbia
Fundersnot available
KeywordsMicroelectromechanical systemsDeflection (physics)TouchdownInstabilityDielectricMaterials scienceVoltageNonlinear systemMechanicsElectrostaticsMembraneOpticsOptoelectronicsEngineeringElectrical engineeringPhysicsChemistry

Abstract

fetched live from OpenAlex

An idealized electrostatic MEMS device, consisting of a thin dielectric elastic membrane supported above a rigid ground plate, is analyzed. The upper surface of the membrane is coated with a thin conducting film. When a voltage V is applied to the thin conducting film, the membrane deflects towards the ground plate and if V is increased beyond a critical value V* (the pull-in voltage), touchdown occurs at finite time creating a so-called "pull-in instability". The mathematical model lends to a nonlinear parabolic problem for the dynamic deflection of the thin dielectric membrane. By allowing for a spatially varying permittivity profile, it is shown that the pull-in instability can be delayed until larger values of V* and that greater pull-in distances can be achieved. Applying various analytical and numerical techniques, finite touchdown time and a refined description of MEMS touchdown behavior are also discussed.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Simulation or modeling · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.003

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.001
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.002
GPT teacher head0.199
Teacher spread0.197 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designSimulation or modeling
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations0
Published2006
Admission routes1
Has abstractyes

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