A CMOS-MEMS scanning probe microscope with integrated position sensors
Bibliographic record
Abstract
We report on an integrated scanning probe microscope (SPM) fabricated in a CMOS-MEMS process. The design of this device is driven by the requirements of an atomically precise manufacturing (APM) approach based on patterned atomic layer epitaxy (ALE). A scan range of 10 mum times 10 mum is achieved with in-plane electrothermal actuation, and the cantileverpsilas out-of-plane range of motion enables a 30 mum sample approach. A test structure to optimize the in-plane actuator design is preseented, and its results are compared to an FEA model. Piezoresistive strain gauges and temperature sensors are strategically located in the in-plane actuators and the out-of-plane cantilever for use in an off-chip closed-loop positioning system.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".