A Highly accurate method to calculate capacitance of MEMS sensors with circular membranes
Bibliographic record
Abstract
A highly accurate analytical method to calculate capacitance of MEMS capacitive type sensors with circular membranes has been presented. The method determines the center deflection of the membrane by taking account of the electrostatic pressure due to the bias voltage, external pressure, residual stress, and nonlinear spring hardening effect during large deflection. A new deflection shape function uses this center deflection to calculate a highly accurate deflection profile of the membrane which is then used to calculate the capacitance between the deformed membrane and the fixed backplate for any deformed profile of the membrane. The model has been verified by comparing the results with experimental and 3-D electromechanical finite element analysis (FEA) results with excellent agreement. The model predicted values deviate by a maximum of 2.2% for the membrane center deflection and 3.4% for capacitance values for different external pressure loading and electrostatic bias voltage.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".