Time dependent breakdown of ultrathin gate oxide
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Bibliographic record
Abstract
Time dependent dielectric breakdown (TDDB) of ultrathin gate oxide (<40 /spl Aring/) was measured for a wide range of oxide fields (3.4<|E/sub ox/|<10.3 MV/cm) at various temperatures (100/spl les/T/spl les/342/spl deg/C). It was found that TDDB of ultrathin oxide follows the E model. It was also found that TDDB t/sub 50/ starts deviating from the 1/E model for fields below 7.2 MV/cm. Below 4.8 MV/cm, TDDB t/sub 50/ of intrinsic oxide increased above the value predicted by the E model obtained for fields >4.8 MV/cm. The TDDB activation energy for this type of gate oxide was found to have linear dependence on oxide field. In addition, we found that /spl gamma/ (the field acceleration parameter) decreases with increasing temperature. Furthermore, it was found that testing at high temperatures (up to 342/spl deg/C) and low electric field values did not introduce new gate oxide failure mechanism. It is also shown that TDDB data obtained at very high temperature (342/spl deg/C) and low fields can be used to generate TDDB model at lower temperatures and low fields. Our results (an enthalpy of activation of 1.98 eV and dipole moment of 12.3 e/spl Aring/) are in complete agreement with previous results by McPherson and Mogul. Additionally, it was found that TDDB is exponentially dependent on the gate voltage.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.003 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it