(Invited) Spatial ALD, Deposition of Al<sub>2</sub>O<sub>3</sub> Films at Throughputs Exceeding 3000 Wafers per Hour
Bibliographic record
Abstract
Al2O3 is the first ALD film being introduced in the solar cell (PV) industry. The primary driver for implementation is two-fold: excellent surface passivation and low cost-of-ownership. ‘Spatial’ ALD systems satisfy both criteria. On Fz and Cz-type wafers minority carrier lifetimes in the range of 5-8 and 0.5-1ms, respectively, are obtained. With this type of film, PERC-type cells with efficiencies > 20% were realized. Further, such cells are processed with throughputs > 3000 wafers/hr. The thermal stability of the film is improved by selecting thin films (< 6nm), and by carrying out a post-deposition anneal at 600°C. This anneal drives out excess hydrogen that is incorporated during deposition, thereby avoiding the formation of blisters upon exposure to subsequent high-temperature (‘firing’) steps.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.013 | 0.005 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".