Reduction of perfluorinated compound emissions using atmospheric pressure microwave plasmas: Mechanisms and energy efficiency
Bibliographic record
Abstract
Abstract The abatement of perfluorinated compound (PFC) gases is investigated using atmospheric pressure microwave-surface-wave plasmas. These PFCs are diluted in nitrogen gas with concentration ranging from 5000 to 10 000 ppmv. The abatement mechanisms of SF6 and CF4 are examined, and conversion schemes are presented in the case where oxygen is added to the gas mixture. The PFC fragments are oxidized, forming acid-like by-products that are finally trapped irreversibly using a humidified soda lime scrubber. Gas-phase analysis was performed using Fourier transform infrared (FTIR) spectroscopy. The abatement efficiency is found to increase with increasing absorbed microwave power and gas residence time. The energy efficiency of the abatement process is shown to increase, with PFC concentrations in the gas mixture up to 10 000 ppmv. A complete conversion of SF6 is achieved for energy densities ranging from 700 to 1200 J/cm3 for concentrations ranging from 5000 to 10 000 ppmv. Lowering the microwave excitation frequency and using swirling flow are shown to reduce the energy cost per abated molecule.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".