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Record W2116986666 · doi:10.1116/1.1627334

Investigation of substrate rotation at glancing incidence on thin-film morphology

2003· article· en· W2116986666 on OpenAlexaff
Brian Dick, M. J. Brett, T. Smy

Bibliographic record

VenueJournal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003
Typearticle
Languageen
FieldMaterials Science
TopicOptical Coatings and Gratings
Canadian institutionsCarleton UniversityUniversity of Alberta
Fundersnot available
KeywordsMaterials scienceRotation (mathematics)Substrate (aquarium)MicrostructureSiliconMorphology (biology)EvaporationThin filmOpticsAluminiumLimitingRotational speedCrystallographyComposite materialOptoelectronicsNanotechnologyGeometryChemistryPhysics

Abstract

fetched live from OpenAlex

Films deposited by evaporation at glancing angles form structures dependent on the speed of substrate rotation. If the substrate is held stationary, oblique columns are grown. For slow substrate rotation, helices are formed while faster rotation yields pillars. Silicon and silicon dioxide films grown under similar conditions were found to follow the typical morphological trend. In contrast, aluminum films formed by glancing angle deposition (GLAD) were found to be facetted structures which were peaked and isolated at high rotation speeds (dφ/dt>42 rpm), and flat for dφ/dt∼1.5 rpm. The results suggest that the primary limiting factor controlling GLAD microstructure growth may be a combination of both material temperature and crystal structure of the resulting film.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.001
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.002
Threshold uncertainty score0.008

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.001
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0020.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.018
GPT teacher head0.232
Teacher spread0.214 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations59
Published2003
Admission routes1
Has abstractyes

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Same venueJournal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and PhenomenaSame topicOptical Coatings and GratingsFrench-language works237,207