Fluorinated aminoalkoxide CuII complexes: new CVD precursors for deposition of copper metal
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Bibliographic record
Abstract
Volatile low-melting CuII metal complexes of formula Cu[OC(CF3)R1CH2NHR2]2 (R1 = CF3 or CH3; R2 = CH2CH2OMe, Bui, or But) and Cu[OC(CF3)R1CH2NMe2]2 (R1 = CF3 or CH3) have been synthesized and characterized by spectroscopic methods. A single-crystal X-ray diffraction study on Cu[OC(CF3)2CH2NHCH2CH2OMe]2 shows that one methoxyethyl group of the aminoalkoxide ligand forms an intramolecular dative bond to the Cu atom to produce a square-pyramidal geometry at the metal center, while the second is linked to the Cu atom of the adjacent molecule, giving an N2O4 octahedral coordination arrangement. For the second Bui-substituted complex, Cu[OC(CF3)2CH2NHBui]2, the X-ray structural analysis demonstrated an N2O2 square-planar geometry, with one alkoxide oxygen atom forming strong H-bonding to an adjacent water molecule. Metal CVD experiments were carried out, showing that the source reagents Cu[OC(CF3)2CH2NHBui]2, Cu[OC(CF3)2CH2NHBut]2, and Cu[OCMe(CF3)CH2NHBui]2, which possess a secondary amino group, are capable of depositing copper metal at temperatures of 250–300 °C under inert Ar carrier gas, while Cu[OCMe(CF3)CH2NMe2]2, with a tertiary amine group, requires the use of reductive H2 carrier gas to induce metal deposition at lower temperatures.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.004 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it