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Record W2119163471 · doi:10.1149/1.1371255

Fabrication of Perforated Thin Films with Helical and Chevron Pore Shapes

2001· article· en· W2119163471 on OpenAlexafffund
Kenneth D. Harris, K. L. Westra, Michael J. Brett

Bibliographic record

VenueElectrochemical and Solid-State Letters · 2001
Typearticle
Languageen
FieldMaterials Science
TopicOptical Coatings and Gratings
Canadian institutionsUniversity of Alberta
FundersNatural Sciences and Engineering Research Council of Canada
KeywordsMaterials sciencePhotoresistFabricationThin filmEtching (microfabrication)PerforationComposite materialDeposition (geology)SiliconChevron (anatomy)Isotropic etchingOpticsNanotechnologyOptoelectronicsLayer (electronics)

Abstract

fetched live from OpenAlex

Using glancing angle deposition and templating techniques, we fabricated a number of thin films with unique perforation geometries. Template thin films consisting of columns having the negative of the desired pore shape (i.e., arrays of isolated helices or chevrons) were first deposited by glancing angle deposition. These template films were then filled with a solution of the desired material and allowed to cure. The template material was removed by chemical etching, leaving a perforated thin film. Such perforated films have been produced of photoresist and spin-on-glass, on both silicon and glass substrates. The perforations have taken the form of chevrons and helices of large and small geometrical pitch, and have been arranged in both random and periodic (1 μm spacing) arrays. © 2001 The Electrochemical Society. All rights reserved.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.007
Threshold uncertainty score0.411

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.006
GPT teacher head0.216
Teacher spread0.210 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations36
Published2001
Admission routes2
Has abstractyes

Explore more

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