Bibliographic record
Abstract
A quarter century has passed since the first semiconductor planarization experiments were conducted in the silicon wafer manufacturing facility in 1983 at IBM in East Fishkill, NY. This paper will review selected highlights of the technology and business drivers that shaped what has become a pervasive, critically enabling process sector in the pursuit of Moore's Law. Since 1988 the segment has grown from zero to $1.2B in capital equipment and $2.0B in consumable materials and ancillaries annually. The fundamental CMP process consisting of a polisher, slurry and pad has spawned a supply chain of no fewer than 18 uniquely identifiable CMP-related product lines and countless businesses. CMP has indeed matured, with an overall growth rate that matches but no longer exceeds that of the industry to which it has become so vital. The paper will conclude with an outlook for the near-term growth opportunities for CMP.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.005 | 0.010 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.002 |
| Science and technology studies | 0.002 | 0.005 |
| Scholarly communication | 0.007 | 0.009 |
| Open science | 0.001 | 0.005 |
| Research integrity | 0.004 | 0.007 |
| Insufficient payload (model declined to judge) | 0.019 | 0.007 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".