Surface activated bonding of 8 in. Si wafers for MEMS and microfluidic packaging
Bibliographic record
Abstract
The challenges for direct wafer bonding using surface activated bonding (SAB) method have been investigated. For this purpose, 4-8 in silicon wafers with and without fine patterns were bonded in vacuum. Three challenges are identified through comprehensive investigations of the bonded interfaces using infrared (IR) transmission, tensile pulling, and high-resolution transmission electron microscopy (HRTEM) observation. First is the alignment between the wafers. While the alignment accuracy is about 5 mum before contacting the wafers, it becomes about 17 mum after bonding. Second are the air-gaps across the bonded interface due to processing induced artifacts and particles. Third is the wafer bow, which control the three-dimensional (3D) bonding. Three-bulk Si 8 inch wafers were bonded together for 3D bonding. Thin wafers with small bow are recommended for 3D bonding using the SAB method.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.003 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".