Arrays of periodic submicron conductive links in Si covered by SiO<sub>2</sub>formed by polarized laser irradiation
Bibliographic record
Abstract
Arrays of periodic submicron conductive links were fabricated in silicon covered by SiO2 when polarized frequency doubled Nd:YAG pulsed laser irradiation is focused on the gap between two highly doped regions. The principle of the process is based on the fact that the laser forms periodic melting in silicon, thus inducing preferential dopant diffusion and creating an array of fine conductive links between the highly doped regions. A scanning capacitance microscopy (SCM) was employed to detect these submicron structures and to measure their electrical properties. It was found that between two and seven submicron conductive links are observed in a focused spot size of 3 µm and their number depends only on the laser intensity ranging from 3.10 W to 3.75 W, while their average width (151–300 nm) and depth (108–147 nm) strongly depends on both the laser intensity and number of laser pulses. The resistances of these links are between 363–493 Ω and the effective average doping levels are from 1.5 × 1018 to 2.4 × 1019 cm−3.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".