Large-Stroke Microelectrostatic Actuators for Vertical Translation of Micromirrors Used in Adaptive Optics
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Bibliographic record
Abstract
Two microelectrostatic actuators able to produce a repulsive force in the out-of-plane direction are presented in this paper. The electrostatic actuators use an asymmetric electric field surrounding the top and bottom surfaces of the moving fingers to produce a repulsive force. The displacement of translation micromirrors driven by these actuators is not limited by the "pull-in" effect and, therefore, can achieve a large stroke. In addition, the usage of a repulsive force leads to the elimination of the stiction problem. An analytical model relating the displacement of the first actuator to voltage applied is presented. The analytical model and numerical simulations show that a translation micromirror driven by the first actuator can achieve a stroke as large as 6/spl mu/m at a driving voltage of 50 V. The second actuator, suitable for fabrication using Multi-User-MEMS-Processes (MUMPs), is developed. A prototype translation micromirror driven by the second actuator achieved a vertical stroke of 2 /spl mu/m, which is more than three times the stroke of conventional MUMPs translation micromirrors.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it