Distributed MEMS Tunable Impedance-Matching Network Based on Suspended Slow-Wave Structure Fabricated in a Standard CMOS Technology
Bibliographic record
Abstract
A tunable RF microelectromechanical system (MEMS) impedance-matching network operating at a frequency band from 13 to 24 GHz based on the distributed microelectromechanical transmission line (DMTL) concept is presented in this paper. The network is implemented using a standard 0.35- ¿m CMOS technology and employs a novel suspended slow-wave (SSW) structure on a silicon substrate. The SSW structure results in a reduced total footprint and enhanced impedance coverage. The 8-bit DMTL matching network, fabricated using switched MEMS capacitors and SSW coplanar waveguide on a silicon substrate, results in a wide coverage of the Smith chart up to a maximum voltage standing-wave ratio of 11.5:1 with an impedance matching better than 10 dB and a power transfer ratio of better than -2.84 dB at 24 GHz. To our knowledge, this is the first implementation of a DMTL tunable MEMS impedance-matching network using a standard CMOS technology.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".