Distributed MEMS Tunable Impedance-Matching Network Based on Suspended Slow-Wave Structure Fabricated in a Standard CMOS Technology
Bibliographic record
Abstract
A tunable RF microelectromechanical system (MEMS) impedance-matching network operating at a frequency band from 13 to 24 GHz based on the distributed microelectromechanical transmission line (DMTL) concept is presented in this paper. The network is implemented using a standard 0.35- ¿m CMOS technology and employs a novel suspended slow-wave (SSW) structure on a silicon substrate. The SSW structure results in a reduced total footprint and enhanced impedance coverage. The 8-bit DMTL matching network, fabricated using switched MEMS capacitors and SSW coplanar waveguide on a silicon substrate, results in a wide coverage of the Smith chart up to a maximum voltage standing-wave ratio of 11.5:1 with an impedance matching better than 10 dB and a power transfer ratio of better than -2.84 dB at 24 GHz. To our knowledge, this is the first implementation of a DMTL tunable MEMS impedance-matching network using a standard CMOS technology.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.001 | 0.002 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".