Light-induced degradation of native silicon oxide–silicon nitride bilayer passivated silicon
Bibliographic record
Abstract
This article reports on the effects of aging and light induced degradation of the passivation quality of the interface formed by the crystalline silicon surface and facile grown oxide—SiNx bilayer. Stable passivation quality against aging and light soaking require thicker oxide layers grown at room temperature, suggesting that thicker oxide layers mitigate the migration of hydrogen from the interface and hence the defect density under light soaking. In addition, the stoichiometry of the PECVD SiNx influences the stability of the passivation quality. Specifically, the rate of degradation in passivation quality is observed to correlate with the optical absorption properties of SiNx; the higher the optical absorption the greater the degradation in passivation. This result is attributed to neutralization of the K+ centers in SiNx. Passivation layers with SiNx deposited with 5% silane in nitrogen to ammonia gas ratio of 7 and facile grown native oxide thickness of ∼1 nm resulted in the most stable passivation scheme within the scope of the reported experiments.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".