Design and Optimization of a New Highly Linear Tunable MEMS Capacitor
Bibliographic record
Abstract
In this paper, a novel linearly tunable MEMS capacitor with high tunability is introduced. The characteristic air gap-voltage curve for an ideally linear tunable capacitor is studied. This curve is considered as a target for new designs. A three-structural layer process is used to develop the capacitor. The actuation and sense gaps in the three-plate capacitor are selected in such a way that for a voltage interval (between zero and pull-in), the gap-voltage response for sense electrodes becomes similar to the ideal curve. The resulting capacitance-voltage response of the new design demonstrates a combination of high linearity and tunability up to 250%. For processes which have fixed layer thickness and the sense and actuation gaps cannot be optimized, the design is modified by adding nonlinear springs and asymmetric geometry. The results of numerical simulation for a capacitor designed for PolyMUMPs process verify the improvement of linearity and tunability.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".