Nonlinear skin effect in inductive discharge
Bibliographic record
Abstract
Summary form only given. Reduction of capacitive coupling and transmission line effects and simplification of RF driving means with reduction of their cost have promoted the utilization of relatively low RF frequency in industrial ICP. RF frequencies between 0.4-2 MHz have become more and more preferable to traditional 13.56 MHz. Transition to ICP at a low driving frequency brings about a variety of non-linear phenomena associated with the RF magnetic field acting in the skin layer of an ICP. We report on a comparative study of a near-collisionless ICP driven over a wide range of frequencies between 13.56-0.45 MHz. The experiments were conducted in a cylindrical discharge chamber with a flat induction coil. The working gas was argon at 1m Torr and RF power dissipated in plasma was 200 W. Space distribution of the basic plasma parameters electron density, electron temperature, plasma potential and EEDF were measured with a Langmuir probe while the electromagnetic field and current density distribution were measured with a magnetic probe. Our measurements at low driving frequencies show that the RF Lorentz force in the skin layer is much larger than the force acting on electrons in the discharge maintaining RF electric field.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.001 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.010 | 0.002 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".