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Record W2138597467 · doi:10.1109/ccece.2005.1557267

MEMS mechanical logic units: design and fabrication with micragem and polymumps

2006· article· en· W2138597467 on OpenAlexafffund
Sae‐Won Lee, Robert W. Johnstone, A. Parameswaran

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsSimon Fraser University
FundersNatural Sciences and Engineering Research Council of CanadaCMC Microsystems
KeywordsLogic gateCantileverMicroelectromechanical systemsTransistorSemiconductorRelayElectrical engineeringMaterials scienceNMOS logicElectrical contactsPass transistor logicFabricationOptoelectronicsElectronic engineeringComputer scienceVoltageEngineeringPhysicsPower (physics)

Abstract

fetched live from OpenAlex

We are currently developing basic building blocks for creating digital logic units that are based on mechanical components, which could be used instead of transistors. Transistors, which are based on semiconductors, rely on precisely controlling the conductivity of their constituent materials. However, at low or high temperatures, that control is lost as semiconductors revert to intrinsic behaviour. Also, semiconductors exhibit various complications under ionizing irradiation. We are looking into creating logic units that use electrical signals, but mechanical relays, with technology provided by MEMS. The logic units consist of a mechanical relay with three electrical gates. The mechanical relay is fabricated with metal over insulator and is operated by applying voltage to the gate, which creates an electric force between the gate and a cantilever. The established electric force arches the cantilever, which is shorted to the source, to make a contact with the drain. Since the operation is based on interactions between metal gates, the proposed method does not suffer from the limitations shared by semiconductors. With different input combinations applied to the gates of the device, development of MEMS mechanical logic units is possible, including all of the standard digital gates.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.002
Threshold uncertainty score0.006

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0010.000
Science and technology studies0.0000.000
Scholarly communication0.0010.001
Open science0.0010.000
Research integrity0.0010.000
Insufficient payload (model declined to judge)0.0020.001

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.012
GPT teacher head0.188
Teacher spread0.176 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations9
Published2006
Admission routes2
Has abstractyes

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