Single Wafer Tool Cleaning for Bi-layer Photoresist Rework - Stripper Development and Evaluation
Bibliographic record
Abstract
A wet-cleaning solution for bi-layer photoresist rework using single-wafer tool process has been developed and proved to be successful. The chemical design of stripper related to cleaning mechanism was investigated. The cleaning performance of two types of strippers were evaluated and compared between beaker and single-wafer tool process. The results indicated that chemical design of stripper is the key to determine cleaning mechanism for bi-layer photoresist. It is demonstrated that removal of bi-layer photoresist through lift-off is not acceptable in single-wafer tool process; dissolution proved to be the key mechanism for successful removal of bi-layer photoresist in a single wafer tool. For single-wafer tool evaluation, the influence of process parameters such as wafer spin speed, process time, medium temperature and chemical dispense characteristics were evaluated and are discussed.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".