Thick SU-8 and PDMS Three-Dimensional Enclosed Channels for Free-Standing Polymer Microfluidic Systems
Bibliographic record
Abstract
This paper presents the design, simulation, and fabrication of polymer 3D enclosed free-standing microchannels. These microchannels are designed to be combined with polymer interconnects for the eventual realization of modularly connected polymer microfluidic systems. Microchannels with a width of 200 mum, depth of 200 mum, and a channel length of 8400 mum were simulated using ANSYS CFD Flotran. Preliminary simulations with an input velocity of 0.02 m/s yielded an expected pressure drop along the microchannel of 52 Pa. PDMS and SU-8 microchannels were fabricated ranging in thicknesses from 200 mum to 300 mum, and a sacrificial process using thick photoresist (SC 1827) and structural SU-8 (SU-8 100) was developed for releasing the SU-8 enclosure layer. In addition, 200 mum to 300 mum thick SU-8 molds were employed for PDMS (Sylgard 184) processing. After bonding, the fabrication resulted in freestanding microchips in SU-8 or PDMS with enclosed microchannels that are compatible with microfluidic polymer interconnect.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".