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Record W2146029244 · doi:10.1109/iitc.1998.704912

Modelling microstructure development in trench-interconnect structures

2002· article· en· W2146029244 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldMaterials Science
TopicCopper Interconnects and Reliability
Canadian institutionsAdvanced Micro Devices (Canada)
Fundersnot available
KeywordsTrenchCopper interconnectMaterials scienceMicrostructureAspect ratio (aeronautics)Texture (cosmology)Energy minimizationSurface energyGrain sizeInterconnectionAnisotropySurface finishComposite materialOpticsLayer (electronics)Computer scienceComputational chemistry

Abstract

fetched live from OpenAlex

The effects of surface and interfacial energies and trench geometry on microstructure evolution in damascene-processed interconnect structures are modelled. Grain growth and texture evolution are shown to depend on the magnitude of surface and interfacial energy variations with crystallographic orientation and with trench aspect ratio. Grain texture evolution in high aspect ratio trenches is driven by the minimization of grain sidewall interfacial energy, whereas the crystallographic evolution of grains within low aspect ratio structures is determined by more typical surface and lower interface energy minimization considerations. Comparisons are made to recent experimental results which characterize the development of crystallographic texture and grain size in damascene-processed interconnects.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesInsufficient payload (model declined to judge)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.039
Threshold uncertainty score0.988

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0120.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.029
GPT teacher head0.232
Teacher spread0.203 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Quick stats

Citations3
Published2002
Admission routes1
Has abstractyes

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